[21p-P09-1~30] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21p-P09-10] Effects of growth temperature of 3D island buffer layers on the sputtering deposition of single crystalline Zn_1-xMg_xO films

〇Kotaro Yataka¹, Takahumi Yunoue¹, Naoto Yamashita¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1.Kyushu Univ.)

Keywords:

ZnMgO,sputtering,heteroepitaxy