[21p-P09-1~30] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21p-P09-23] Heavy Si doping of β-Ga₂O₃ thin film on Sapphire substrate grown by APMOVPE

〇Shun Ukita¹, Takeyoshi Tajiri¹, Kazuo Uchida¹ (1.UEC)

Keywords:

Ga2O3,MOVPE