The 84th JSAP Autumn Meeting 2023
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Tue. Sep 19, 2023
Wed. Sep 20, 2023
Thu. Sep 21, 2023
Fri. Sep 22, 2023
Sat. Sep 23, 2023
JSAP EXPO (Exhibition) 1
Vacuum
Materials
Photonics
Laser
Analytical
Thin-Film
Electrical
Chiller
Software
M＆BE
JSAP EXPO (Exhibition) 2
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Presentation Information
[21p-P09-29]
Temperature and HCl partial pressure dependences of HCl gas etching for (001) β-Ga
2
O
3
substrates
Yuichi Oshima
1
, 〇Takayoshi Oshima
1
(1.NIMS)
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Keywords:
Ga2O3,gas etching,HCl
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