[22a-A307-1~9] 6.6 Probe Microscopy

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[22a-A307-2] Carrier Distribution Observation by SCFM for Degradation Analysis of Barium Titanate Multilayer Ceramic Capacitors

〇Masaki MasakiSumi Sumi¹, Yuki Oyama¹, Nobuo Satoh¹ (1.Chiba Institute of Tech.)

Keywords:

Multilayer Ceramic Capacitor,Scanning Capacitance Force Microscopy

Multilayer ceramic capacitors (MLCCs) degrade and fail due to a decrease in insulation resistance caused by the application of DC voltage. This is considered to be caused by the migration of oxygen vacancies in the dielectric due to an electric field. On the other hand, it is necessary to observe the migration of oxygen vacancies inside MLCCs in order to elucidate the phenomena related to insulation degradation. In this study, we observed the carrier distribution inside the MLCC using a multifunction probe microscope equipped with scanning capacitance force microscopy (SCFM). From the observation results, the distribution of carriers biased in the dielectric layer was imaged.