Presentation Information
[22a-A307-8]Improvement in scanner response by digital filtering with a stable filtered inverse system
〇Kazuki Miyashita1, Shinji Watanabe2 (1.Math. &Phys., Kanazawa Univ., 2.WPI-NanoLSI, Kanazawa Univ.)
Keywords:
scanning ion conductance microscopy,feedforward control