[22a-A401-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[22a-A401-12] Desorbed Angle Distribution of Etching Products by Ion Beam injections

〇Tomoko Ito¹, Kazuhiro Karahashi¹, Satoshi Hamaguchi¹ (1.Osaka Univ.)

Keywords:

grazing ion beam,plasma etching,Etching products