[22a-B101-1~10] 15.4 III-V-group nitride crystals

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[22a-B101-1] Effect of nitrogen plasma treatment on sapphire substrate surface on InN growth

〇Takahiro Gotow¹, Naoto Kumagai¹, Tetsuji Shimizu¹, Hisashi Yamada¹, Toshihide Ide¹, Tatsuro Maeda¹ (1.AIST)

Keywords:

InN,MOCVD

In this study, we investigated the effect of nitrogen plasma treatment on top of the sapphire substrate prior to InN growth. It is found that nitrogen plasma treatment just before InN growth improves InN quality from the Raman spectra of InN.