Presentation Information
[22a-B101-10]Effect of N polar AlN underlayer crystallinity on electrical properties of GaN/AlN structure
〇Taketo Kowaki1, Koki hanasaku1, Minagi Miyamoto1, Daisuke Inahara1, Aina Hiyama Zazuli1, Kai Fuji1, Taisei Kimoto1, Ryosuke Ninoki1, Satoshi Kurai1, Narihito Okada1, Yoichi Yamada1 (1.Grad.School of Sci.& Tech. for Inovation Yamaguchi Univ.)
Keywords:
AlN,GaN