Presentation Information

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[22a-C402-8]Enhancement effect of light sensitivity in SOI photodiode by diffraction grating composed of two-dimensional metallic hole array

〇Ryuji Yamamoto¹, Hiroaki Satoh^1,2 (1.GSIST, Shizuoka Univ., 2.RIE, Shizuoka Univ.)

Keywords:

SOI Photodiode,diffraction grating,spectroscopic light sensitivity

In this report, the enhancement effect in spectroscopic light sensitivity of SOI (silicon-on--insulator) photodiode with two-dimensional hole array type metallic diffraction grating is discussed by the simulated results using FDTD method and the measured results of fabricated device. As a result, it is found that the enhancement effect of light sensitivity appears when the phase matching condition is satisfied between the near fields around diffraction grating and SOI waveguiding mode. The detail will be explained in our presentation.

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