[22a-C501-1~8] 22.1 Joint Session M "Phonon Engineering"

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[22a-C501-4] Low Thermal Conductivity in Si-Ge-Sn-O Quaternary Amorphous Thin Films

〇(PC)Kunihiko Shizume¹, Sasaki Michiko^1,2, Goto Masahiro², Shiomi Junichiro¹ (1.UTokyo, 2.NIMS)

Keywords:

Amorphous,Thermal conduction,Thermoreflectance

We fabricated Si-Ge-Sn-O quaternary amorphous thin films using combinatorial sputtering and measured their thermal conductivity using the frequency-domain thermoreflectance method. It was observed that the thermal conductivity decreases with increasing concentrations of Sn and O. The lowest achieved thermal conductivity was 0.2 W/mK. The reduction in thermal conductivity can be attributed to the mass mismatch introduced by Sn, which has a relatively heavy mass, and O, which has a relatively light mass.