[22p-A306-1~22] 17.1 Carbon nanotubes & other nanocarbon materials

1:00 PM - 1:15 PM JST(4:00 AM - 4:15 AM UTC)

[22p-A306-1] Properties of Clover-Flower-Like Carbon Prepared by RF Magnetron Sputtering

〇Yudai Tokito¹, Yuta Sasaki², Soichiro Koga², Masami Aono¹ (1.Graduate School of Science and Engineering, Kagoshima Univ., 2.Faculty of Engineering, Kagoshima Univ.)

Keywords:

nanocarbon,RF magnetron sputtering

In the process of preparing amorphous carbon (a-C) thin films, a spherical carbon was discovered by chance. This spherical carbon was named Clover-Flower-Like Carbon (CFL-C) because of its conical carbon structure, which resembles that of white clover. In this study, we attempted to synthesize CFL-C by changing various parameters of the radiofrequency magnetron sputtering method, and investigated the shape and chemical bonding state of the obtained CFL-C.