[22p-A401-1~10] Systematic Building of Green and Sustainable Semiconductor Manufacturing Technologies

4:45 PM - 5:15 PM JST(7:45 AM - 8:15 AM UTC)

[22p-A401-8] Flow rate standard for semiconductor process gases

〇Toshihiro Morioka¹ (1.AIST)

Keywords:

metrology standard,gas flow rate,semiconductor process gas

A round-robin test among AIST and domestic will be presented, in order to to develop and disseminate flow standards for semiconductor process gases.