[22p-B201-1~14] 13.7 Compound and power devices, process technology and characterization

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[22p-B201-10] Low-damage PEC etching on p-GaN surface and its electrochemical characterization (2)

〇Umi Takatsu¹, Taketomo Sato¹ (1.RCIQE,Hokkaido Univ.)

Keywords:

p-GaN,PEC etching