Presentation Information
[22p-P01-6]Defect formation on hexagonal boron nitride by atmospheric-pressure plasma irradiation
〇(P)Kenichi Inoue1, Takashi Kondo1, Kenji Ishikawa1, Masaru Hori1 (1.Nagoya Univ. cLPS)
Keywords:
hexagonal boron nitride,defect,atomospheric-pressure plasma
The point defects in hexagonal boron nitride (h-BN) are attracting attention for the application to single-photon sources and quantum sensors. Plasma processing is required to develop the methods enabling large-scale and high-density defect formation. The mechanism of h-BN defect formation by plasma processing, such as kind of effective species, is still under investigation. In this study, h-BN powder was irradiated by a He atmospheric-pressure plasma, and the active species in the plasma and structure of formed defects were investigated. Electron spin resonance revealed increase of nitrogen vacancies in h-BN irradiated by the He plasma.