Session Details
[22p-P01-1~10]8.2 Plasma deposition of thin film, plasma etching and surface treatment
Fri. Sep 22, 2023 1:30 PM - 3:30 PM JST
Fri. Sep 22, 2023 4:30 AM - 6:30 AM UTC
Fri. Sep 22, 2023 4:30 AM - 6:30 AM UTC
P01 (KJ Hall)
[22p-P01-1]Effect of Plasma Assistance with Nitrogen-Hydrogen Gas Mixtures on Synthesis of Zinc Oxide Thin Films by Mist CVD
〇Yuzuki Moro1, Keigo Takeda1, Mineo Hiramatsu1 (1.Meijo Univ.)
[22p-P01-2]Numerical analysis of input-power dependence of low-pressure RF plasma properties for effective utilization of hydrocarbon gas for DLC deposition
〇(M1)Takuya Ishihara1, Shun Sasaki1, Hiroyuki Kousaka2, Akinori Oda1 (1.Chiba Insy.Technol., 2.Gifu Univ.)
[22p-P01-3]Production of Water Vapor Plasma Using Reactive Magnetron Sputtering with DC and Pulsed Power Operations
〇Shinsaku Inoue1, Allen Catapang1, Motoi Wada1 (1.Doshisha Univ.)
[22p-P01-4]Hydrogenation of Magnesium-based Materials by Hydrogen Plasma and Its Improvement
〇Akihisa Ogino1, Shion Imata1 (1.Shizuoka Univ.)
[22p-P01-5]PEO Coatings of AZ91D with Organic Compounds
〇(M2)Ryoma Koga1, Yuichiro Takemura1 (1.Kindai Univ.)
[22p-P01-6]Defect formation on hexagonal boron nitride by atmospheric-pressure plasma irradiation
〇(P)Kenichi Inoue1, Takashi Kondo1, Kenji Ishikawa1, Masaru Hori1 (1.Nagoya Univ. cLPS)
[22p-P01-7]Driving frequency dependence of surface modification effects in atmospheric pressure plasma treatment of plastic materials.
〇(BC)Takuto Nozawa1, Soma Chiku1, Shoma Sakamoto1, Hiromasa Yamada1 (1.NIT. Nagano college)
[22p-P01-8]Effects on dyeing of natural fiber fabrics by atmospheric pressure plasma
〇(BC)Shoma Sakamoto1, Takuto Nozawa1, Soma Chiku1, Hiromasa Yamada1 (1.NIT Nagano College)
[22p-P01-9]Plasma impedance monitoring system externally installed in plasma process equipment
〇Yuji Kasashima1, Shinji Kuniie2, Toshiyuki Sayama2 (1.AIST, 2.Advantest)
[22p-P01-10]Removal of Polystyrene-based Polymers Using Water Vapor Plasma
Kyohei Yamaji1, 〇Masashi Yamamoto1, Khant Nyar Paing2, Takeshi Aizawa2, Tatsuo Ishijima2, Hideo Horibe3 (1.Kagawa KOSEN, 2.Kanazawa Univ., 3.Osaka Metrop. Univ.)