[22p-P03-1~9] 15.5 Group IV crystals and alloys

[22p-P03-2] Fabrication of fully suspended microbridges based on Ge-on-SOI

〇Ayaka Odashima¹, Takahiro Inoue¹, Masaki Nagao¹, Kentarou Sawano¹ (1.Tokyo City Univ.)

Keywords:

semiconductor,Germanium,microbridge