[22p-P03-1~9] 15.5 Group IV crystals and alloys

[22p-P03-3] Crack formation in strained SiGe/Ge-on-Si(111) by ultrasonic treatment

〇Yuuka Shibahara¹, Rena Kanesawa¹, Syuya Kikuoka¹, Masaki Nagao¹, Michihiro Yamada^2,3, Kohei Hamaya^2,4,5 (1.Tokyo City Univ., 2.CSRN, Osaka Univ., 3.JST-PRESTO, 4.OTRI, Osaka Univ., 5.GSES, Osaka Univ.)

Keywords:

SiGe,ultrasonic treatment