[22p-P07-1~6] 13.3 Insulator technology

[22p-P07-1] Impacts of Energy Dependence of Interface Trap Density on Conductance Curve

〇Noriyuki Taoka¹, Aoi Teshima¹, Yusuke Ichino¹, Yoshiyuki Seike¹, Tatsuo Mori¹ (1.Aichi Inst. Tech)

Keywords:

MOS interface,Interface traps,Conductance method