[23a-A303-1~11] 13.3 Insulator technology

9:00 AM - 9:30 AM JST(12:00 AM - 12:30 AM UTC)

[23a-A303-1] [INVITED] Statistical Measurement of Electrical Characteristics of Functional Thin Films Using Impedance Measurement Platform Technology

〇Koga Saito¹, Tatsuhiko Suzuki¹, Hidemi Mitsuda¹, Takezo Mawaki^1,2, Tomoyuki Suwa², Akinobu Teramoto^2,3, Shigetoshi Sugawa², Rihito Kuroda^1,2 (1.Grad. Sch. Eng. Tohoku Univ., 2.NICHe Tohoku Univ., 3.Res. Inst. for Nanodevices Hiroshima Univ.)

Keywords:

semiconductor,SiN,trap characteristics

We present a statistical measurement of trap characteristics of SiN dielectric films using a current measurement platform that realizes high speed, high precision, and statistical measurement of current-voltage characteristics about arbitrary functional thin films. Furthermore, a novel impedance measurement platform technology is proposed to realize the statistical measurement of current-voltage characteristics, as well as other electrical characteristics on a single platform.