[23a-A303-1~11] 13.3 Insulator technology

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[23a-A303-6] Phonon analysis of SiO₂ with different atomic densities using ultra-high energy resolution STEM-EELS

〇Takanori Asano¹, Manabu Tezura¹, Masumi Saitoh¹, Hiroki Tanaka¹ (1.Kioxia Corp.)

Keywords:

SiO2,STEM-EELS,Phonon