[23a-A602-1~9] 15.5 Group IV crystals and alloys

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[23a-A602-1] Improvement of carrier mobility of Sn-doped polycrystalline Ge thin films(≤20nm) by post annealing and thinning

〇Taishiro Koga¹, Takaya Nagano¹, Kenta Moto², Keisuke Yamamoto², Taizoh Sadoh¹ (1.ISEE Kyushu Univ., 2.IGSES, Kyushu Univ.)

Keywords:

semiconductor