[23a-B205-1~11] 13.2 Exploratory Materials, Physical Properties, Devices

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[23a-B205-4] Controlling conductivity type of B-ion-implanted p-BaSi₂ films prepared by sputtering

〇Takumi Sato¹, Takenaka Haruki¹, Rui Du¹, Kimimaru Kajihara¹, Yoichiro Koda², Masami Mesuda², Kaoru Toko¹, Takashi Suemasu¹ (1.Tsukuba Univ., 2.Tosoh Corporation)

Keywords:

semiconductor,solar cell,sputtering