Presentation Information

[23p-A202-10]Local CV characteristics measurement of mechanically exfoliated single layer MoS2 using scanning nonlinear dielectric microscopy

〇(M1)Taiyo Ishizuka1,2, Kohei Yamasue2 (1.Tohoku Univ., 2.RIEC, Tohoku Univ.)

Keywords:

layered semiconductor,Scanning Nonlinear Dielectric Microscopy,local CV characteristics measurement

Local CV characteristics measurement by time-resolved SNDM, an extension of scanning nonlinear dielectric microscopy (SNDM), were applied to an atomic layer semiconductor, molybdenum disulfide (MoS2). The local CV characteristics of single-layer and multi-layer MoS2 were measured and compared, and it was confirmed that the local CV characteristics of single-layer MoS2 shifted in the negative voltage direction and the capacitance change was small. The above results indicate that there is a possibility to evaluate microscopic properties of atomic layer semiconductors by measuring local CV characteristics using SNDM.