[23p-A301-1~14] 8.1 Plasma production and diagnostics

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[23p-A301-12] Influence of magnet arrangement on RF ring-shaped hollow magnetized plasma production using two facing cylindrical targets

〇Bunta Kondo¹, Yasunori Ohtsu¹ (1.Saga Univ.)

Keywords:

thin films,cylindrical targets,ring-shaped hollow magnetization plasma

In this study, we focused on the opposed-target sputtering method, which suppresses the effect of damage on thin films. To solve this problem, we developed a ring-shaped hollow magnetization plasma system using cylindrical opposed targets, in which two cylindrical targets with different diameters are placed opposite each other. However, it uses as many as 24 expensive neodymium magnets, which is a high cost in practical use. Therefore, in order to reduce the number of magnets, the effect of magnet arrangement on plasma generation was investigated.