[23p-A301-1~14] 8.1 Plasma production and diagnostics

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[23p-A301-13] Measurement of spatial distribution of RF magnetron plasmausing fluorocarbon polymer targetfor preparing hydrophobic films.

〇Ryohei Kuno¹, Yasunori Ohtsu¹, Takeshi Yasunaga², Yasuyuki Ikegami² (1.Saga Univ., 2.Saga Univ IOES.)

Keywords:

plasma

A high-frequency magnetron plasma with a fluoropolymer target was generated, and the spatial distribution of the ion saturation current proportional to the ion flux was measured by the electrostatic probe method.