[23p-A301-1~14] 8.1 Plasma production and diagnostics

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[23p-A301-3] Influence of reflected light from the chamber inner wall upon electron temperature and density in plasma diagnostics by tomographic optical emission spectroscopic measurement

〇(DC)Yuya Yamashita^1,2, Kenta Doi³, Tetsuji Kiyota³, Wataru Kikuchi¹, Kenta Ishi¹, Shuhei Watanabe¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Tokyo Tech, 2.JSPS DC, 3.ULVAC)

Keywords:

optical emission spectroscopic measurement,tomography,collisional-radiative model

In tomographic optical emission spectroscopic measurement of plasmas, multiple reflections on the chamber inner wall can increase the measurement uncertainty. In this study, we experimentally investigated the influence of reflectance of the chamber inner wall and the layout of line-of-sights on the reconstructed image. The use of a pressurized, vapor-sealed, anodized aluminum inner wall in the chamber reduced the distortion of the reconstructed image. Based on the collisional radiation model, the spatial distribution of electron temperature and electron density were diagnosed.