[23p-A301-1~14] 8.1 Plasma production and diagnostics

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[23p-A301-7] Relationship between nitrogen atom density and ammonia production rate
in N₂/H₂ low-pressure miniature ECR plasma

〇(M2)Shogo Uebayashi¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

Keywords:

ammonia production,plasma catalysis

In the synthesis process of ammonia using plasma and catalyst together, many studies consider the contribution of nitrogen atoms to the formation of ammonia, while others point to the contribution of vibrationally excited state nitrogen molecules. The objective of this study was to measure the production rate of ammonia and the density of nitrogen atoms in a nitrogen/hydrogen mixed low gas pressure plasma and to investigate the correlation between them. As reported in the previous report, hysteresis of the nitrogen atom density was observed in the small ECR plasma source used in the experiment, which was probably caused by the condition of the vacuum vessel wall, and the reproducibility of the nitrogen atom density with respect to the discharge conditions was poor. Therefore, in this study, the correlation between the nitrogen atomic density and the ammonia production rate was investigated by simultaneously measuring the nitrogen atomic density and the ammonia production rate.