Presentation Information
[23p-A301-9]Influence of magnetic field strength of magnetized RFEA on negative ion energy
distribution function measurements
〇Yoshinobu Matsuda1, Yosuke Kanahori1, Seiichi Hayakawa1, Tamiko Oshima1 (1.Nagasaki Univ.)
Keywords:
RFEA,magnetic filter,zinc oxide
The energy distribution function (EDF) of substrate incident charged particles during magnetron sputtering deposition of Ga-doped ZnO targets was measured using a magnetron RFEA combined with a reflection field energy analyzer (RFEA) and a magnetic filter (MF).
A search for the optimum conditions for the MF central flux density revealed that a central flux density of about 200 G is desirable for negative ion measurements with minimal effect on the magnetron discharge and sufficient suppression of electron inflow.
A search for the optimum conditions for the MF central flux density revealed that a central flux density of about 200 G is desirable for negative ion measurements with minimal effect on the magnetron discharge and sufficient suppression of electron inflow.