[23p-A303-1~8] 13.3 Insulator technology

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[23p-A303-3] Influences of Post-thermal oxidation and Post-metallization Anneal of Zr/Hf-Multilayer Structures on Crystalline Phases in HfZr Oxide Layers

〇(M2)Yunosuke Sano¹, Noriyuki Taoka², Akio Ohta³, Katsunori Makihara¹, Seiichi Miyazaki¹ (1.Nagoya Univ., 2.Aichi Inst. Tech., 3.Fukuoka Univ.)

Keywords:

Hafnium,Crystalline structure