[23p-A307-1~15] 6.3 Oxide electronics

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[23p-A307-11] Photocatalytic properties of TiO₂ sputter thin films with CeO₂ underlayer deposited at room temperature

〇Hitoshi Wako¹ (1.Dexerials)

Keywords:

Sputtering,Cerium(IV) oxide,Titanium(IV) oxide

To deposit TiO₂ with high photocatalytic activity on plastic films by sputtering at room temperature, a CeO₂ underlayer was investigated. When TiO₂ was deposited directly on a glass substrate, TiO₂ crystallization was hardly observed, and its self-cleaning performance, one of the photocatalytic performances, was low. On the other hand, when TiO₂ was deposited after the CeO₂ underlayer was formed, TiO₂ crystallization was clearly observed, and the self-cleaning performance was also improved.