Presentation Information

[23p-A602-14]Photoemission Study on Si and Ge Segregation on Al/Si0.2Ge0.8(111) Structures

〇(M2)Taiki Sakai1, Akio Ohta2, Noriyuki Taoka3, Katsunori Makihara1, Yuji Yamamoto4, Seiichi Miyazaki1 (1.Nagoya Univ., 2.Fukuoka Univ., 3.Aichi Inst. of Tech., 4.IHP)

Keywords:

SiGe,XPS,Segregation