Presentation Information

[23p-A602-6]Increasing critical thickness and suppression of crack generation in strained SiGe/Ge multiple quantum wells formed on Ge-on-Si (111)

〇Rena Kanesawa1, Syuya Kikuoka1, Yuka Shibahara1, Youya Wagatsuma1, Michihiro Yamada3,4,5, Kohei Hamaya2,3,5, Kentarou Sawano1 (1.Tokyo City Univ., 2.GSES, Osaka Univ., 3.CSRN, Osaka Univ., 4.JST-PRESTO, 5.OTRI, Osaka Univ.)

Keywords:

semiconductor,SiGe,MQW