Presentation Information
[23p-B205-4]Dependence of Si/Fe supply ratio on photo-response in β-FeSi2 pn homojunctions
〇Kota Tanaka1, Hidekazu Kanda1, Yoshikazu Terai1 (1.Kyushu Inst. of Tech)
Keywords:
semiconductor,dark current,Si/Fe supply ratio
The silicide semiconductor β-FeSi2 is expected to be a promising photoelectric conversion material in the near-infrared region. We have fabricated β-FeSi2 pn homojunction devices and succeeded in detecting light in the near-infrared region. We have fabricated devices with a Si/Fe supply ratio of RSi/RFe = 1.17, which achieves the chemically amphoteric composition during growth, and investigated the current-voltage (I-V) and spectral response characteristics. In this device, defects at the pn junction interface are considered to increase the dark current. In this study, we fabricated devices by changing the Si/Fe ratio and verified the Si/Fe supply ratio dependence of the dark current and spectral response.