Poster presentation[16p-P02-1~12]8.2 Plasma deposition of thin film, plasma etching and surface treatmentMon. Sep 16, 2024 1:30 PM - 3:30 PM JSTMon. Sep 16, 2024 4:30 AM - 6:30 AM UTCP02 (Exhibition Hall A)Download PDF
Oral presentation[18a-A31-1~11]8.2 Plasma deposition of thin film, plasma etching and surface treatmentWed. Sep 18, 2024 9:00 AM - 12:00 PM JSTWed. Sep 18, 2024 12:00 AM - 3:00 AM UTCA31 (TOKI MESSE 3F)Akihisa Ogino(Shizuoka Univ.)Download PDF
Oral presentation[18p-A31-1~19]8.2 Plasma deposition of thin film, plasma etching and surface treatmentWed. Sep 18, 2024 1:30 PM - 6:30 PM JSTWed. Sep 18, 2024 4:30 AM - 9:30 AM UTCA31 (TOKI MESSE 3F)Haruka Suzuki(Nagoya Univ.), Masanaga Fukasawa(AIST)Download PDF