Presentation Information
[22a-12N-6]Repeated imprint using replica mold in UV nanoimprint process and fabrication of replica mold aiming for large area imprint
〇Risa Tanaka1, Ohsaki Takeshi1, Jun Taniguchi2 (1.Toyo Gosei, 2.Tokyo Univ. of Sci.)
Keywords:
UV nanoimprint,Replica mold,Large area mold
In UV nanoimprint, the mold used in this process is known as a master mold, and these master molds are expensive to be used as stamps for production itself directly. Replica mold made by resins, a copy of the master molds, are used repeatedly to prevent damage to the master molds and reduce process costs. In this method, high durability is desirable for the replica mold over repeated cycles. Furthermore, a large-area replica mold, which is fabricated from one small master mold, can be reduce the cost in comparison with fabricating a large-area master mold.
In this study, we conducted repeat imprinting tests to investigate the durability of the replica molds. Additionally, we confirmed the concept of the fabrication process to obtain a large-area replica mold by adhering replica molds, and we observed the seam of tiled replica molds.
In this study, we conducted repeat imprinting tests to investigate the durability of the replica molds. Additionally, we confirmed the concept of the fabrication process to obtain a large-area replica mold by adhering replica molds, and we observed the seam of tiled replica molds.