[22a-12N-1~10] 7.3 Micro/Nano patterning and fabrication

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[22a-12N-7] Investigation of transfer pattern profiles in thermal nanoimprint process

〇Hiroaki Kawata¹, Rina Tsunetou¹, Yoshihiko Hirai¹, Hisao Kikuta¹ (1.Osaka Metro. Univ.)

Keywords:

thermal nanoimprint,pattern transfer

The mold pattern must be accurately transferred on the resin surface. In this study, we investigated the mold pattern transfer characteristics for thermal nanoimprint process of PMMA. When a mold had hole patterns only in 0.3 mm square region of a 10 mm square Si mold, fabricated PMMA patterns around the center of the pattern region were poor. When the mold pattern region was 5mm square, good PMMA pstterns were obtained over the entire pattern region. It is considered that the substrate deformation affects the pattern transfer characteristics.