Presentation Information
[22a-12N-8]Study on mold release process for tilted diffraction gratings for AR/VR Glasses using nanoimprinting
Yusei Kunitou1, Masaaki Yasuda1, 〇Yoshihiko Hirai1 (1.Osaka Metropolitan. Univ.)
Keywords:
nanoimprint,tilted grating,demolding
Direct nanoimprinting can process a variety of materials into a variety of shapes in batch process. Taking advantage of this feature, fabrication of tilted diffraction gratings for AR/VR glasses were under development. To control the reflection and extraction of light image in a thin glass plate, it is necessary to fabricate tilted grating structures with different tilting directions. Therefore, the mold release process is one of the most important processes. In this report, we analyze the induced strain during mold release process for two types of mold release modes: rotational mold release, in which the rigid mold is lifted from one side, and roll release, in which the mold is moved around the circumference of the mold.