[22p-12G-1~11] 8.1 Plasma production and diagnostics

5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[22p-12G-11] Measurement of surface reaction of hydrogen atom in remote plasma with vacuum ultraviolet absorption spectroscopy

〇Keigo Takeda¹, Kazushi Masuda¹, Mineo Hiramatsu¹ (1.Meijo Univ.)

Keywords:

Atomic radical,Surface loss probability,Vacuum ultraviolet absorption spectroscopy