The 71st JSAP Spring Meeting 2024
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Session Details

Oral presentation8 Plasma Electronics : 8.1 Plasma production and diagnostics

[22p-12G-1~11]8.1 Plasma production and diagnostics

Fri. Mar 22, 2024 2:15 PM - 5:45 PM JST
Fri. Mar 22, 2024 5:15 AM - 8:45 AM UTC
12G (Building No. 1)
Keigo Takeda(Meijo Univ.), Haruka Suzuki(Nagoya Univ.), Nakagawa Yusuke(Tokyo Metropolitan Univ.)
2:15 PM - 2:45 PM JST(5:15 AM - 5:45 AM UTC)

[22p-12G-1][The 45th Paper Award Speech] Angular distribution measurement of high-energy particles incident on an RF electrode in a dual-frequency capacitively-coupled plasma

Keita Ichikawa1, Manh Hung Chu1, Makoto Moriyama1, Haruka Suzuki1,2, Daiki Iino3, Hiroyuki Fukumizu3, Kazuaki Kurihara3, 〇Hirotaka Toyoda1,2 (1.Nagoya Univ., 2.Nagoya Univ. cLPS, 3.Kioxia Corp.)
2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[22p-12G-2]Energy-resolved measurement of ion angular distribution in dual-frequency capacitively-coupled plasma

〇Shunya Kawamura1, Dohan Kim1, Haruka Suzuki1, Daiki Iino2, Hiroyuki Fukumizu2, Kazuaki Kurihara2, Toyoda Hirotaka1 (1.Nagoya Univ., 2.Kioxia Corp.)
3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[22p-12G-3]A note on the measurement of the ion energy distribution function during magnetron sputtering using a magnetized retarding field energy analyzer

〇Yoshinobu Matsuda1, Yosuke Kanahori1, Seiichi Hayakawa1, Tamiko Oshima1 (1.Nagasaki Univ.)
3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[22p-12G-4]The Effect and Durability of a Diamond Electron Emission Layer on DC Discharge from Hollow Cathode with Axial Magnetic Field

〇Hisao Miyazaki1, Shigeya Kimura1 (1.Toshiba R&D Center)
3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[22p-12G-5]Condensation Mechanism of the Photoemission-assisted Plasma

〇Haruhiro Naito1, Naoki Kato2, Takayuki Watanabe2, Susumu Takabayashi1 (1.NIT, Ariake College, 2.Tanabe Engineering Corporation)
4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[22p-12G-6]New proposal of plasma heat flux measurement with water target

〇Hiroto Matsuura1, Takumi Nakano1, Xuan Nhat Son Bui1 (1.Osaka Metro. Univ.)
4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[22p-12G-7]Gas temperature determination of DC glow discharge using Mach-Zehnder interferometry

〇Ren Kimura1, Yusuke Nakagawa1, Fumiyoshi Tochikubo1 (1.Tokyo Metropolitan Univ.)
4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[22p-12G-8]Real-time Temperature Measurement of Silicon Wafer Surface Under Plasma Irradiation using Optical-Interference Contactless Thermometry (OICT)

〇(M1)Ryunosuke Goto1, Hiroaki Hanafusa1, Higashi Seiichiro1 (1.Hiroshima Univ.)
4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[22p-12G-9]Highly Accurate Arc Temperature Measurement in Wide Range with High-Speed Camera

〇Yuki Takemoto1, Manabu Tanaka1, Takayuki Watanabe1 (1.Kyushu Univ.)
5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[22p-12G-10]Effects of Langmuir Probe Measurement on levitating fine-particles in Plasma

〇TIANXIANG WANG1, M Inoue1, T Taguchi2, Y Oda1, D Takayama1, D Hiro1, S Park1, Y Karaki3 (1.Setsunan Univ, 2.Japan Atomic Energy Agency, 3.Nara Inst. of Sci. & Tech)
5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[22p-12G-11]Measurement of surface reaction of hydrogen atom in remote plasma with vacuum ultraviolet absorption spectroscopy

〇Keigo Takeda1, Kazushi Masuda1, Mineo Hiramatsu1 (1.Meijo Univ.)
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