Presentation Information
[22p-12G-3]A note on the measurement of the ion energy distribution function during magnetron sputtering using a magnetized retarding field energy analyzer
〇Yoshinobu Matsuda1, Yosuke Kanahori1, Seiichi Hayakawa1, Tamiko Oshima1 (1.Nagasaki Univ.)
Keywords:
RFEA,magnetic filter,zinc oxide
The energy distribution function (EDF) of substrate incident charged particles during magnetron sputtering deposition of Ga-doped ZnO targets was measured using a magnetron RFEA combined with a reflection field energy analyzer (RFEA) and a magnetic filter (MF).
The investigation of the direction of the local magnetic field of the MF and the effect of the MF position on the magnetron discharge revealed that the ion EDF measurement with magnetized RFEA requires a crossed magnetic field so that the magnetron magnetic field and the MF central magnetic field are perpendicular to each other.
The investigation of the direction of the local magnetic field of the MF and the effect of the MF position on the magnetron discharge revealed that the ion EDF measurement with magnetized RFEA requires a crossed magnetic field so that the magnetron magnetic field and the MF central magnetic field are perpendicular to each other.