Presentation Information
[22p-52A-11]Efficient method for extracting basis functions and estimating layer structure using electron spectroscopy simulator
〇shunichi yoneda1, Ryo Murakami2, Kenji Nagata2, Hiroshi Shinotsuka2, Hideki Yoshikawa2, Hiromi Tanaka1, Shigeo Tanuma2 (1.Yonago college, 2.NIMS)
Keywords:
basis learning,wide spectrum,X-ray photoelectron spectroscopy
In X-ray photoelectron spectroscopy (XPS), it was thought to be very difficult to perform automatic quantitative estimation using a wide spectrum.
Therefore, the purpose of this research was to develop a method for automatically and quickly quantitatively estimating the film thickness structure of a sample from a wide spectrum. By establishing a methodology for approximating the output of an electron spectroscopy simulator with a mathematical model using basis learning, it has become possible to provide inverse estimation of film thickness from a measured wide spectrum in practical time.
Therefore, the purpose of this research was to develop a method for automatically and quickly quantitatively estimating the film thickness structure of a sample from a wide spectrum. By establishing a methodology for approximating the output of an electron spectroscopy simulator with a mathematical model using basis learning, it has become possible to provide inverse estimation of film thickness from a measured wide spectrum in practical time.