Presentation Information
[22p-P04-3]On-Wafer Hall measurement method with ohmic formation using high voltage pulses
〇Kazuki Kodama1, Daisuke Ueda1, Osamu Tatebayashi2, Makoto Masuda3, Antonio Fermin3, Tadao Hashimot4 (1.NYCU, 2.Yamamotogiken, 3.Seikenn, 4.SixPoint Meterials)
Keywords:
high voltage pulse,ohmic contact,hall measurement
The Van der Pauw method can be applied to semiconductors of various shapes, but it takes time to evaluate them because of the sample cutting and anealing the electrode.In the case of wide bandgap semiconductors, the probe contact is a Schottky contact with high breakdown voltage, so the required current cannot flow.
In this study, by applying high voltage and low current pulses, ohmic contacts can be formed on AlGaN/GaN epi, enabling sheet resistance measurement. We have also developed a simple Hall measurement system with an orthogonal arrangement of eight probes.
In this study, by applying high voltage and low current pulses, ohmic contacts can be formed on AlGaN/GaN epi, enabling sheet resistance measurement. We have also developed a simple Hall measurement system with an orthogonal arrangement of eight probes.