Presentation Information
[22p-P07-26]FTIR analysis of carbon films deposited by using styrene-additive HPPS plasma
Yuto Ooishi1, Atsuya Kuwada1, Ryohei Higashida1, 〇Masanori Shinohara1, Maeda Fumihiko2, Satoshi Tanaka3, Takashi Matsumoto3 (1.Fukuoka Univ., 2.Fukuoka Inst. Technol., 3.Tokyo Electron Technology Solutions Limited.)
Keywords:
graphene,source molecule,FTIR
We have tried graphene growth with High power Impulse Magnetron plasma using styrene as a source molecule. To elucidate the role of styrene, we analyzed the film deposited at RT during the plasma, with FTIR. FTIR measurements did not detect the structure of 6-membered ring structure. The structure would be destroyed during plasma deposition. It is suggested that other hydrocarbon molecules can be used as molecules for sources of graphene growth.