Presentation Information
[22p-P07-44]Effect of cooling rate on CVD growth of multilayer h-BN
〇(M1)Shota Yokozawa1, Tsubasa Nojima1, Hiroki Hibino1 (1.Kwansei Gakuin Univ.)
Keywords:
two dimensional material,hexagonal boron nitride
To better understand the growth mechanism of multilayered h-BN, we report the results of an investigation into the effect of the cooling rate after the raw material supply on the synthesis of multilayered h-BN using the chemical vapor deposition (CVD) method. The experimental results showed that the number of h-BN layers tended to increase with slower cooling after the raw material feeding. Thus, the importance of controlling the solid solution of the raw materials to the substrate and their surface deposition during cooling was demonstrated for controlling the number of layers in the CVD growth of h-BN on FeNi alloys.