Presentation Information
[22p-P07-48]Anisotropic wet etching of TMD multilayers by using photo-induced carriers
〇Shuto Muranaka1, Naoto Horikawa1, Ryousuke Ishikawa1, Yusuke Hoshi1 (1.Tokyo City Univ.)
Keywords:
transition metal dichalcogenide,Anisotropic wet etching