Presentation Information
[22p-P07-65]Dependence of electrode materials on the ReRAM operation of WSe2/WOx
〇(B)Shuhei Fukushima1, Mitsuru Inada1, Keiji Ueno2, Mahito Yamamoto1 (1.Kansai Univ, 2.Saitama Univ)
Keywords:
two dimensional semiconductor,Resistive random access memory,WSe2
Resistive random access memory(ReRAM) is a two-terminal nonvolatile memory consisting of, for example, a thin oxide sandwiched between electrodes. Recently, two-dimensional materials have been attracting attention as an active layer for ReRAM. We have attempted to apply ultra-thin WOx films obtained by ozone treatment of two-dimensional WSe2 to ReRAM. In this research, we fabricated WSe2/WOx ReRAM using Ni and Ag as electrodes and found differences in the operating mechanism depending on the electrode material.