[23a-21C-1~9] 15.4 III-V-group nitride crystals

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[23a-21C-4] Fabrication of Al-rich AlGaN multi-channel diodes via sputtering

〇Takao Kozaka¹, Ryota Maeda¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS)

Keywords:

AlN,AlGaN,Sputtering