Presentation Information
[23a-21C-5]Growth of N-polar AlN and GaN/AlN heterrostructure
〇(M1C)Itsuki Furuhashi1, Markus Pristovsek2 (1.Nagoya Univ., 2.Nagoya Univ. IMaSS)
Keywords:
N-polar,Growth crystals
N-polar high electron mobility transistors(HEMT) is considered as a more high frequency devices, but it has some problems about N-polar nitrides growth.In this presentation, we talk about growth of N-polar AlN and GaN/AlN heterostructure, especially, surface morphology.