Presentation Information

[23a-21C-6]Metalorganic Vapor Phase Epitaxy of Interlayer-free GaN Polarity Inverted Structure

〇Kazuhisa Ikeda1, Masahiro Uemukai1, Tomoyuki Tanikawa1, Ryuji Katayama1 (1.Osaka Univ.)

Keywords:

semiconductor,nitride