Presentation Information

[23a-52A-9]Impacts of single Shockley-type stacking faults in blocking-voltage layer on electrical characteristics of 4H-SiC PiN diodes

〇Satoshi Asada1, Koichi Murata1, Hidekazu Tsuchida1 (1.CRIEPI)

Keywords:

SiC,Stacking Faults,PiN Diodes